Vacuum Automation
Delivering an Automated Advantage for Our Customers
In semiconductor vacuum processing, every substrate transfer matters. Cleanliness, speed, and repeatability all have a direct impact on process performance, throughput, and uptime. Brooks brings more than robotics—we provide an application solution that brings an advantage to our customers.
Understanding High-Value Problems in Vacuum Automation
In semiconductor vacuum processing, even small variations in substrate transfer can create production risk. Particle generation, vibration, thermal instability, and transfer timing can affect yield, delay qualification, reduce uptime, and increase total cost of ownership. Customers need more than a robot—they need a vacuum automation partner that understands the application, the process environment, and the fastest path to stable production.
Solving Complex Challenges
Brooks partners with customers to solve complex vacuum automation challenges with application-specific expertise, proven robotics, and modular, configurable vacuum systems that simplify development and support faster time to market.
Our solutions are optimized to deliver the best cost of ownership, taking advantage of our proven technology while engineering specific solutions to solve our customers’ high-value problems today and in the future.
Experience That Gets Vacuum Automation Right the First Time
Brooks brings deep, application‑specific expertise built on the industry’s largest and most diverse installed bases of vacuum robots and systems. Decades of deployment across logic, memory, specialty, and advanced packaging applications have shaped proven, scalable architectures embedded across the MagnaTran® robot portfolio and Marathon® modular vacuum platforms. Lessons learned from thousands of production systems improve process stability, simplify integration, and reduce execution risk—our teams partner with customers to get their automation right the first time with consistent performance, long product lifetimes, and best‑in‑class total cost of ownership.
Proven at Scale. Trusted When It Matters Most.
10,000+
Brooks vacuum systems running in semiconductor fabs worldwide today
70,000+
Brooks robots handling wafers in active production today
~50B
Wafers transported per year across the entire installed base
Production‑Proven Vacuum Automation, Trusted Worldwide
Brooks vacuum automation solutions have demonstrated consistent performance to stringent specifications with high uptime and best-of-class reliability. Our solutions are proven for many years within 300mm, 200mm, compound semiconductor, reticle, and advanced packaging markets.
More than 10,000+ vacuum systems delivered running more than 80M+ maintenance free hours annually
More than 70,000+ robots delivered — supporting ~50B wafers annually
Demonstrated >10 years of reliable, maintenance free, 24/7 operation
Solutions deployed across every major vacuum process type at every fab around the world
40+ years of application engineering expertise supporting customer fabs in every major region
Providing Vacuum Automation That Connects Process Workflows for Optimized Cost of Ownership
Brooks’ vacuum automation engineering brings decades of application-specific and system architecture expertise to connect your processes to support future growth, reliable performance, and best-in-class cost of ownership.
MagnaTran® Vacuum Robots
Vacuum robots provide precise wafer handling and transfer within process tools, maintaining consistent positioning and repeatability. Configurations support advanced processes, including high-temperature environments.
Brooks solutions:
MagnaTran® Vacuum Robots, MagnaTran® High-Temperature Robots, Leap™ Vacuum Robot Platforms
Marathon® Vacuum Systems
Vacuum systems coordinate wafer transfer across atmospheric and vacuum environments, integrating EFEM, load ports, and process modules. These systems maintain consistent flow between process steps and support stable production performance.
Brooks solutions:
Marathon® Vacuum Systems, Marathon® EFEM Platforms, Load Port Systems
Lowering Total Cost of Ownership Across the Equipment Lifecycle
Maximize Tool Availability
We provide predictive diagnostics on 100s of variables.
Improve Productivity
Proven field upgradable solutions to optimize throughput, repeatability, and payloads.
Minimize Tool Downtime
Local, knowledgeable service engineers and qualified spares.
Partner with Brooks on Your Vacuum Automation Challenge
Ready to solve your toughest vacuum automation challenge? Connect with a Brooks application specialist to explore how precise substrate handling, proven reliability, and deep application expertise can help elevate performance and unlock faster results.