Interface Automation
Delivering an Automated Advantage for Our Customers
Complex automation systems for semiconductor production require industry standard, clean, reliable interfaces for wafers, reticles, substrates and carriers. Brooks delivers interface automation that is critical to enable consistent operation, cleanliness, and supporting production at scale.
Understanding High-Value Challenges for Interface Automation
Ensuring reliable and clean transport of substrates in and out of highly complex semiconductor equipment is becoming a high-value problem as the demand for new technology puts pressure on industry standard specifications. Understanding and measuring variation in substrates before starting complex processes is critical for yield performance.
Solving Critical Interface Automation Challenges
Brooks reticle interface solutions are on every EUV lithography tool running today. Their reliability and cleanliness demonstrates what an effective automation interface should be – proven, consistent and trusted, to eliminate operational disruption.
The demands for 200 mm, SMIF interface automation continues to be strong as the need for new power devices within EV vehicles and data centers require new technology. As customers need to improve yield and cost of 200 mm factories, Brooks provides proven interface solutions to the majority of equipment tools and the capability to engineer integration for new tools.
Proven in Semiconductor Production
Reticle Interfaces Designed into 25 OEMs, Including Leading-Edge Lithography
Qualified SMIF Interfaces Supporting
> 50 OEMs for 200 mm Compound Semiconductor Fabs
> 10,000 Install Base of 300 mm Load Ports Qualified for Reliability and Cleanliness at 2 nm
Interface Automation Solutions
Brooks delivers automation systems that support material handling, identification, and environmental control across semiconductor manufacturing operations.
Reticle and Substrate Interface Solutions
Interface systems support handling, isolation, and transfer between process steps, reducing contamination risk and ensuring consistent operation.
Brooks solutions:
EUV Reticle Loadport
Vision LEAP Load Ports Wafer Handling and Transport Systems
Automated handling systems support movement and transfer across process steps while maintaining consistency in production environments.
Brooks solutions:
Vision LEAP
SMIF Contamination-Controlled Environments and Interfaces
Controlled environments reduce contamination risk and support consistent transport and processing across fab infrastructure.
Brooks solutions:
SMIF, Versaport
Identification and Process Systems
Identification systems track materials and coordinate movement across manufacturing processes..
Brooks solutions:
Auto ID
Improve Fab Operations Performance
Connect with Brooks to improve system coordination, reduce variability, and support consistent semiconductor manufacturing operations.